Influence of hydrogen content and network connectivity on the coefficient of thermal expansion and thermal stability for a-SiC:H thin films

✍ Scribed by King, Sean W.; Ross, Liza; Li, Han; Xu, Guanghai; Bielefeld, Jeff; Atkins, Ryan E.; Henneghan, Patrick D.; Davis, Kathleen; Johnson, David C.; Lanford, William A.

• Book ID: 122279919
• Publisher: Elsevier Science
• Year: 2014
• Tongue: English
• Weight: 971 KB
• Volume: 389
• Category: Article
• ISSN: 0022-3093
• DOI: 10.1016/j.jnoncrysol.2014.02.007