PECVD a-SiC:H thin films from liquid organosilanes dependence of photoluminescence on starting material

✍ Scribed by J. Seekamp; J. Niemann; W. Bauhofer

• Book ID: 117150316
• Publisher: Elsevier Science
• Year: 2000
• Tongue: English
• Weight: 101 KB
• Volume: 266-269
• Category: Article
• ISSN: 0022-3093
• DOI: 10.1016/s0022-3093(99)00786-3