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The effect of thermal annealing on the optical properties of a-SiC:H films

✍ Scribed by L. Magafas

Book ID
117149361
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
129 KB
Volume
238
Category
Article
ISSN
0022-3093

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Optimization of the electrical propertie
Optimization of the electrical properties of Al/a-SiC:H Schottky diodes by means of thermal annealing of a-SiC:H thin films
✍ L. Magafas; J. Kalomiros; D. Bandekas; G. Tsirigotis πŸ“‚ Article πŸ“… 2006 πŸ› Elsevier Science 🌐 English βš– 169 KB

The present work reports on the optimization of the electrical properties of Al/a-SiC:H Schottky diodes by means of thermal annealing of a-SiC:H thin films. Optical transmission experiments have shown that the optical properties of the films are affected by thermal annealing when T a 4600 1C, due to