Optimization of the electrical propertie
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L. Magafas; J. Kalomiros; D. Bandekas; G. Tsirigotis
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Article
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2006
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Elsevier Science
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English
โ 169 KB
The present work reports on the optimization of the electrical properties of Al/a-SiC:H Schottky diodes by means of thermal annealing of a-SiC:H thin films. Optical transmission experiments have shown that the optical properties of the films are affected by thermal annealing when T a 4600 1C, due to