Effects of the thickness of the channel
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C.H. Woo; Y.Y. Kim; B.H. Kong; H.K. Cho
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Article
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2010
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Elsevier Science
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English
β 712 KB
InGaZnO thin-film-transistors (TFTs) with various channel thicknesses were fabricated with a bottom gate configuration on SiO 2 /p-Si substrates at room temperature by radio frequency magnetron sputtering. The thickness of the InGaZnO channel layer ranged from 20 to 200 nm and the width/length ratio