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Influence of the thermal annealing temperature of the channel layers grown at room temperature on the device performance in the ZnO thin-film-transistors

✍ Scribed by Cheol Hyoun Ahn; Dong Kyu Seo; Chang Ho Woo; Hyung Koun Cho


Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
366 KB
Volume
404
Category
Article
ISSN
0921-4526

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Effects of the thickness of the channel
✍ C.H. Woo; Y.Y. Kim; B.H. Kong; H.K. Cho πŸ“‚ Article πŸ“… 2010 πŸ› Elsevier Science 🌐 English βš– 712 KB

InGaZnO thin-film-transistors (TFTs) with various channel thicknesses were fabricated with a bottom gate configuration on SiO 2 /p-Si substrates at room temperature by radio frequency magnetron sputtering. The thickness of the InGaZnO channel layer ranged from 20 to 200 nm and the width/length ratio