✦ LIBER ✦
134. Influence of impurities on the growth of silicon epitaxial films at reduced temperatures: I M Skvortsov and B V Orion, Electron Technol, Sci Tech Coll, Semiconductor Devices, No 4, 1971, 99–106 (in Russian)
- Publisher
- Elsevier Science
- Year
- 1973
- Tongue
- English
- Weight
- 131 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0042-207X
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