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Influence of the residual oxygen in the plasma immersion ion implantation (PI3) processing of materials

✍ Scribed by M. Ueda; A.R. Silva Jr.; Carina B. Mello; G. Silva; H. Reuther; V.S. Oliveira


Book ID
113823509
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
776 KB
Volume
269
Category
Article
ISSN
0168-583X

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