Plasma immersion ion implantation of nit
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M. Ueda; C. Leandro; H. Reuther; C.M. Lepienski
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Article
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2005
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Elsevier Science
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English
β 125 KB
Ion implantation of nitrogen into samples of tempered and quenched H13 steel was carried out by plasma immersion technique. A glow discharge plasma of nitrogen species was the ion source and the negative high voltage pulser provided 10-12 kV, 60 ls duration and 1.0-2.0 kHz frequency, flat voltage pu