Influence of sample placement on the dose uniformity in plasma immersion ion implantation of industrial ball bearings

✍ Scribed by Zhaoming Zeng; Xiubo Tian; Dixon Tat-Kun Kwok; Baoyin Tang; Chu, P.K.

• Book ID: 114558821
• Publisher: IEEE
• Year: 1999
• Tongue: English
• Weight: 176 KB
• Volume: 27
• Category: Article
• ISSN: 0093-3813
• DOI: 10.1109/27.782301