✦ LIBER ✦
Improvement of the dose uniformity in plasma immersed ion implantation by introducing a vertical biased ring
✍ Scribed by E. Stamate; N. Holtzer; H. Sugai
- Book ID
- 108289036
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 298 KB
- Volume
- 506-507
- Category
- Article
- ISSN
- 0040-6090
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