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Influence of the Redeposition effect for Focused Ion Beam 3D Micromachining in Silicon

✍ Scribed by Y.Q. Fu; N.K.A. Bryan; O.N. Shing; N.P. Hung


Book ID
105854624
Publisher
Springer
Year
2000
Tongue
English
Weight
140 KB
Volume
16
Category
Article
ISSN
0268-3768

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