✦ LIBER ✦
Erratum to “Morphological influence of the beam overlap in focused ion beam induced deposition using raster scan” [Microelectron. Eng. 87 (5–8) (2010) 972–976]
✍ Scribed by Chung-Soo Kim; Hyung-Jung Kim; Sung-Hoon Ahn; Dong-Young Jang
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 88 KB
- Volume
- 87
- Category
- Article
- ISSN
- 0167-9317
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