The effect of ion-beam specimen preparation techniques on vacancy-type defects in silicon
β Scribed by A.S. Gandy; S.E. Donnelly; M.-F. Beaufort; V.M. Vishnyakov; J.-F. Barbot
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 206 KB
- Volume
- 242
- Category
- Article
- ISSN
- 0168-583X
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