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Influence of the plasma pressure on the microstructure and on the optical and mechanical properties of amorphous carbon films deposited by direct current magnetron sputtering

โœ Scribed by Jacobsohn, L. G.; Freire, F. L.


Book ID
120496858
Publisher
AVS (American Vacuum Society)
Year
1999
Tongue
English
Weight
376 KB
Volume
17
Category
Article
ISSN
0734-2101

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