Microstructure and mechanical properties
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D.G. Liu; J.P. Tu; H. Zhang; R. Chen; C.D. Gu
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Article
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2011
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Elsevier Science
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English
โ 993 KB
Carbon nitride (CN x /CN x ) multilayers with sequential sp 3 -rich and sp 2 -rich layers were deposited on c-Si substrate by direct current magnetron sputtering. The composition, microstructure and morphology of the films were investigated by the X-ray photoelectron spectroscopy and transmission el