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Influence of the addition of CF4 on the deposition of a-C:H layers using the expanding thermal plasma technique

✍ Scribed by Gielen, J.W.A.M.; van de Sanden, M.C.M.; Schram, D.C.

Book ID
123135901
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
423 KB
Volume
4
Category
Article
ISSN
0925-9635

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