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In situ ellipsometric studies of the a-Si:H growth using an expanding thermal plasma

✍ Scribed by A.H.M. Smets; M.C.M. van de Sanden; D.C. Schram


Book ID
114086639
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
319 KB
Volume
343-344
Category
Article
ISSN
0040-6090

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