✦ LIBER ✦
Deposition of amorphous carbon layers from C2H2 and CF4 with an expanding thermal arc plasma beam set-up
✍ Scribed by J.W.A.M. Gielen; M.C.M. Van De Sanden; D.C. Schram
- Book ID
- 118367512
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 907 KB
- Volume
- 271
- Category
- Article
- ISSN
- 0040-6090
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