Influence of the deposition gas on the properties of plasma-deposited carbonized layers
✍ Scribed by D. Boutard; W. Mo¨ller
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 325 KB
- Volume
- 45
- Category
- Article
- ISSN
- 0257-8972
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