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Influence of substrate bias voltage on the physical, electrical and dielectric properties of RF magnetron sputtered TiO 2 films

โœ Scribed by Kondaiah, P; Sekhar, M Chandra; Chandra, S V Jagadeesh; Martins, R; Uthanna, S; Elangovan, E


Book ID
120086001
Publisher
IOP Publishing
Year
2012
Weight
606 KB
Volume
30
Category
Article
ISSN
1757-8981

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