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Influence of RF power on structure and electrical properties of sputtered SrHfON thin films

✍ Scribed by Li-ping Feng; Zheng-tang Liu; Hao Tian; Lu Liu

Book ID: 113795732
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 391 KB
Volume: 78
Category: Article
ISSN: 0167-577X
DOI: 10.1016/j.matlet.2012.03.024

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