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Influence of rapid thermal annealing on morphological and electrical properties of RF sputtered AlN films

✍ Scribed by J.P. Kar; G. Bose; S. Tuli

Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 370 KB
Volume: 8
Category: Article
ISSN: 1369-8001
DOI: 10.1016/j.mssp.2006.04.001

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