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Electrical and Structural Properties of Rapid Thermal Annealed Amorphous Silicon Carbide Films

✍ Scribed by Choi, W. K. ;Ong, T. Y. ;Han, L. J. ;Loh, F. C. ;Tan, K. L.

Publisher: John Wiley and Sons
Year: 1998
Tongue: English
Weight: 185 KB
Volume: 169
Category: Article
ISSN: 0031-8965
DOI: 10.1002/(sici)1521-396x(199809)169:1<67::aid-pssa67>3.0.co;2-h

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