Electrical and Structural Properties of Oxygen-Containing Silicon Annealed at 670–720 K Under High Stress

✍ Scribed by A. Kudla; A. Misiuk; A. Panas; J. Bak-Misiuk

• Publisher: John Wiley and Sons
• Year: 2002
• Tongue: English
• Weight: 145 KB
• Volume: 4
• Category: Article
• ISSN: 1438-1656
• DOI: 10.1002/1527-2648(20020806)4:8<600::aid-adem600>3.0.co;2-5