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Influence of radiofrequency power on compositional, structural and optical properties of amorphous silicon carbonitride films

✍ Scribed by Yinqiao Peng; Jicheng Zhou; Zhichao Zhang; Baoxing Zhao; Xiaochao Tan

Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
407 KB
Volume
256
Category
Article
ISSN
0169-4332

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✦ Synopsis

The SiCN films, of 900-1600 nm thickness, were synthesized at room temperature by RF (13.56 MHz) reactive magnetron sputtering of a polycrystalline silicon target of 99.99% purity with diameter of 100 mm and thickness of 5 mm. Acetylene and nitrogen were

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## Abstract The silicon carbonitride (Si:C:N) films produced by hydrogen remote microwave plasma (RP)CVD from a 1,1,3,3‐tetramethyldisilazane precursor at various substrate temperatures (35–400 °C) are examined in terms of their physical (density), optical (refractive index), and mechanical (hardne