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Influence of oxygen on the wear of silicon

✍ Scribed by R.G. Bayer


Publisher
Elsevier Science
Year
1981
Tongue
English
Weight
427 KB
Volume
69
Category
Article
ISSN
0043-1648

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Influence of Dislocations on Nitrogen–Ox
✍ Yang, Deren ;Que, Duanlin πŸ“‚ Article πŸ“… 1999 πŸ› John Wiley and Sons 🌐 English βš– 119 KB πŸ‘ 2 views

The influence of dislocations on nitrogenΒ±oxygen (NΒ±O) complexes in nitrogen-doped Czochralski (NCZ) silicon was investigated. It was found that NΒ±O complexes were generated during annealing at 650 C for 10 min. In the early stage of annealing the amount of the NΒ±O complexes in NCZ silicon with disl