Influence of Oxygen Content on the Physical and Electrical Properties of Thin Yttrium Oxide Dielectrics Deposited by Reactive RF Sputtering on Si Substrates

✍ Scribed by Tung-Ming Pan; Jian-Der Lee

• Book ID: 107454988
• Publisher: Springer US
• Year: 2007
• Tongue: English
• Weight: 727 KB
• Volume: 36
• Category: Article
• ISSN: 0361-5235
• DOI: 10.1007/s11664-007-0250-1