The effects of oxygen content on electrical and optical properties of indium tin oxide films fabricated by reactive sputtering
β Scribed by Shinich Honda; Michio Watamori; Kenjiro Oura
- Book ID
- 113205298
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 294 KB
- Volume
- 281-282
- Category
- Article
- ISSN
- 0040-6090
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π SIMILAR VOLUMES
## Abstract Transparent thin films of amorphous zinc indium tin oxide were prepared at room temperature by coβsputtering of zinc oxide and indium tin oxide. Effect of oxygen partial pressure on the optical and electrical properties of amorphous zinc indium tin oxide thin films were investigated. Co
Electrical and optical properties of indium tin oxide films coated on soda-lime glass substrates have been investigated as a function of substrate temperature (~ = 250-450 Β°C). Highly conducting (p-~8xlO -4 Β£2 cm) and transparent (T-~90%) films have been obtained at a substrate temperature of 350 Β°C