✦ LIBER ✦

Influence of magnetron configuration on CoCr films sputtered on flexible substrates

✍ Scribed by J Veldeman; H Jia; M Burgelman

Book ID: 114229011
Publisher: Elsevier Science
Year: 1999
Tongue: English
Weight: 157 KB
Volume: 193
Category: Article
ISSN: 0304-8853
DOI: 10.1016/s0304-8853(98)00416-8

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Ta additive effect on RF magnetron sputt

Ta additive effect on RF magnetron sputtered CoCr films

✍ Tamai, H.; Tagami, K.; Hayashida, H. 📂 Article 📅 1988 🏛 IEEE 🌐 English ⚖ 303 KB

Substrate effects in magnetron sputterin

Substrate effects in magnetron sputtering of CoCrTa/Cr films on flexible substrates

✍ J Veldeman; H Jia; M Burgelman 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 272 KB

Development of low temperature RF magnet

Development of low temperature RF magnetron sputtered ITO films on flexible substrate

✍ T.P. Muneshwar; V. Varma; N Meshram; S. Soni; R.O. Dusane 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 270 KB

ITO films deposited on water-cooled flex

ITO films deposited on water-cooled flexible substrate by bias RF Magnetron Sputtering

✍ Zhiwei Yang; Shenghao Han; Tianlin Yang; Lina Ye; Honglei Ma; Chuanfu Cheng 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 226 KB

Stress measurement in sputtered copper f

Stress measurement in sputtered copper films on flexible polyimide substrates

✍ Entenberg, Alan; Lindberg, Vern; Fletcher, Kurtis; Gatesman, Andrew; Horwath, Ro 📂 Article 📅 1987 🏛 AVS (American Vacuum Society) 🌐 English ⚖ 256 KB

Influence of argon gas pressure on the Z

Influence of argon gas pressure on the ZnO:Al films deposited on flexible TPT substrates at room temperature by magnetron sputtering

✍ Wang, Xiaojing (author);Lei, Qingsong (author);Yuan, Junming (author);Zhou, Wenl 📂 Article 📅 2011 🏛 Wuhan University of Technology 🌐 English ⚖ 368 KB