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Stress measurement in sputtered copper films on flexible polyimide substrates

โœ Scribed by Entenberg, Alan; Lindberg, Vern; Fletcher, Kurtis; Gatesman, Andrew; Horwath, Ronald S.


Book ID
115491599
Publisher
AVS (American Vacuum Society)
Year
1987
Tongue
English
Weight
256 KB
Volume
5
Category
Article
ISSN
0734-2101

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