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Measurement of stresses in thin films on single crystalline substrates

✍ Scribed by Bohg, A.

Publisher
John Wiley and Sons
Year
1978
Tongue
English
Weight
430 KB
Volume
46
Category
Article
ISSN
0031-8965

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πŸ“œ SIMILAR VOLUMES

Epitaxial growth of AlN films on single-
Epitaxial growth of AlN films on single-crystalline Ta substrates
✍ S. Hirata; K. Okamoto; S. Inoue; T-W. Kim; J. Ohta; H. Fujioka; M. Oshima πŸ“‚ Article πŸ“… 2007 πŸ› Elsevier Science 🌐 English βš– 587 KB

We have demonstrated the first epitaxial growth of AlN films on single-crystalline Ta substrates by the use of a low-temperature growth technique based on pulsed laser deposition (PLD). Although previous AlN films grown on Ta( 100) and ( 111) substrates have exhibited quite poor crystallinity, an ep