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Electromigration in sputtered copper films on polyimide

✍ Scribed by Hsueh-Wen Wang; Bi-Shiou Chiou; Jiann-Shan Jiang

Book ID: 110271179
Publisher: Springer US
Year: 1999
Tongue: English
Weight: 186 KB
Volume: 10
Category: Article
ISSN: 0957-4522
DOI: 10.1023/a:1008964516337

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