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Development of low temperature RF magnetron sputtered ITO films on flexible substrate

✍ Scribed by T.P. Muneshwar; V. Varma; N Meshram; S. Soni; R.O. Dusane

Book ID
108265618
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
270 KB
Volume
94
Category
Article
ISSN
0927-0248

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Effects of substrate temperature on properties of ITO–ZnO composition spread films fabricated by combinatorial RF magnetron sputtering
✍ Gi-Seok Heo; In-Gi Gim; Jong-Woon Park; Kwang-Young Kim; Tae-Won Kim πŸ“‚ Article πŸ“… 2009 πŸ› Elsevier Science 🌐 English βš– 696 KB

We have fabricated ITO-ZnO composition spread films to investigate the effects of substrate temperature on their electrical and optical properties by using combinatorial RF magnetron sputtering. It turned out by X-ray measurement that the film with zinc contents above 16.0 at% [Zn/(In+Zn+Sn)] showed