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ITO films deposited on water-cooled flexible substrate by bias RF Magnetron Sputtering

✍ Scribed by Zhiwei Yang; Shenghao Han; Tianlin Yang; Lina Ye; Honglei Ma; Chuanfu Cheng

Book ID
108416222
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
226 KB
Volume
161
Category
Article
ISSN
0169-4332

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## Abstract Influences of O~2~/Ar flux ratio (__R__) on surface morphology and structural evolution have been studied in the case of ZnO films deposited on glass substrates by radio‐frequency (rf) magnetron sputtering. Results of atomic force microscopy (AFM), X‐ray diffraction, and X‐ray photoelec