Influence of ion irradiation on internal residual stress in DLC films

✍ Scribed by Platon A. Karaseov; Oleg A. Podsvirov; Konstantin V. Karabeshkin; Andrei Ya. Vinogradov; Alexander Yu. Azarov; Nikita N. Karasev; Andrei I. Titov; Alexander S. Smirnov

• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 613 KB
• Volume: 268
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2010.05.063