✦ LIBER ✦
Effect of ion irradiation on internal stress of amorphic carbon films produced by pulsed laser
✍ Scribed by W.M. Kim; S.K. Lee; B. Cheong; S.G. Kim; O.S. Kim; J.S. Ro
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 614 KB
- Volume
- 270
- Category
- Article
- ISSN
- 0040-6090
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