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Influence of ion bombardment on residual stresses in diamond-like carbon films

✍ Scribed by P. A. Karasev; O. A. Podsvirov; A. Ya. Vinogradov; A. Yu. Azarov; N. N. Karasev; A. S. Smirnov; A. I. Titov; I. V. Korkin; S. V. Poplevkin

Book ID: 110203053
Publisher: Pleiades Publishing
Year: 2009
Tongue: English
Weight: 162 KB
Volume: 3
Category: Article
ISSN: 1027-4510
DOI: 10.1134/s1027451009020116

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