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Residual stress in diamond-like carbon films: Role of growth conditions and ion irradiation

✍ Scribed by O. A. Podsvirov; P. A. Karaseov; A. Ya. Vinogradov; A. Yu. Azarov; N. N. Karasev; A. S. Smirnov; A. I. Titov; K. V. Karabeshkin

Book ID
110203211
Publisher
Pleiades Publishing
Year
2010
Tongue
English
Weight
156 KB
Volume
4
Category
Article
ISSN
1027-4510

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