7213. The role of ion-assisted deposition in the formation of diamond-like carbon films: S Aisenberg,J Vac Sci Technol, A8, 1990, 2140–2154

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 297 KB
• Volume: 42
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(91)91020-o