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Internal stress reduction by incorporation of silicon in diamond-like carbon films

✍ Scribed by Masahito Ban; Takeshi Hasegawa

Book ID: 108423123
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 121 KB
Volume: 162
Category: Article
ISSN: 0257-8972
DOI: 10.1016/s0257-8972(02)00572-8

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