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Stress relief forms of diamond-like carbon thin films under internal compressive stress

✍ Scribed by D. Nir


Publisher
Elsevier Science
Year
1984
Tongue
English
Weight
769 KB
Volume
112
Category
Article
ISSN
0040-6090

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✍ R. Krawietz; B. Kämpfe; E. Auerswald; M. Brücher 📂 Article 📅 2004 🏛 John Wiley and Sons 🌐 English ⚖ 309 KB 👁 1 views

## Abstract The non‐destructive characterization of intrinsic stress is very important to evaluate the reliability of devices based on diamond‐like carbon (DLC) films. Whereas the only requirement for the X‐ray diffraction method is a crystalline state of specimen, Raman spectroscopic stress analys