Raman spectroscopic and X-ray investigat
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R. Krawietz; B. Kämpfe; E. Auerswald; M. Brücher
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Article
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2004
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John Wiley and Sons
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English
⚖ 309 KB
👁 1 views
## Abstract The non‐destructive characterization of intrinsic stress is very important to evaluate the reliability of devices based on diamond‐like carbon (DLC) films. Whereas the only requirement for the X‐ray diffraction method is a crystalline state of specimen, Raman spectroscopic stress analys