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The effect of bombardment with carbon ions on the nanostructure of diamond-like films

โœ Scribed by I. A. Faizrakhmanov; V. V. Bazarov; V. A. Zhikharev; I. B. Khaibullin


Book ID
110126889
Publisher
Springer
Year
2001
Tongue
English
Weight
94 KB
Volume
35
Category
Article
ISSN
1063-7826

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Effect of voltage on diamond-like carbon
โœ Kim wang ryeol; Park min suk; Kim yong whan; Jung uoo chang; Chung won sub ๐Ÿ“‚ Article ๐Ÿ“… 2011 ๐Ÿ› Elsevier ๐ŸŒ English โš– 585 KB

Diamond-like Carbon(DLC) films were deposited by linear ion source (LIS)-physical vapor deposition method changing the anode voltages from 800V to 1800V, bias voltages from earth to -200V and characteristics of the films were investigated using Nano-indentation, Micro raman spectroscopy, Field Emiss