Effect of voltage on diamond-like carbon thin film using linear ion source

✍ Scribed by Kim wang ryeol; Park min suk; Kim yong whan; Jung uoo chang; Chung won sub

• Publisher: Elsevier
• Year: 2011
• Tongue: English
• Weight: 585 KB
• Volume: 10
• Category: Article
• ISSN: 1877-7058
• DOI: 10.1016/j.proeng.2011.04.471

✦ Synopsis

Diamond-like Carbon(DLC) films were deposited by linear ion source (LIS)-physical vapor deposition method changing the anode voltages from 800V to 1800V, bias voltages from earth to -200V and characteristics of the films were investigated using Nano-indentation, Micro raman spectroscopy, Field Emission-Scanning Electron Microscope (FM-SEM) and X-ray Photoelectron Spectroscopy (XPS). The results showed that the residual stress and hardness increased relatively with increasing the ion energy up to anode voltage of 1400V and -100 bias voltage. It was also found that the content of sp 3 carbon was increased with increasing the anode voltage by investigating sp 3 /sp 2 ratio through the micro-raman analysis. From these results, it can be concluded that the physical properties of DLC films such as residual stress and hardness are increased with increasing the anode voltage as 3-dimensional crosslinks between carbon atoms and dangling bond are enhanced and the internal compressive stress is also increased with increasing the anode voltage. The optimal anode and bias voltage is considered to be around 1400V and -100V respectively in these experimental conditions.