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Effect of H2 and O2 plasma etching treatment on the surface of diamond-like carbon thin film

✍ Scribed by Deok Yong Yun; Won Seok Choi; Yong Seob Park; Byungyou Hong

Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 510 KB
Volume: 254
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2008.03.170

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