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Thermochemical etching effect of H2O vapor on CVD diamond film

✍ Scribed by Nozomu Uchida; Tsutomu Kurita; Hideki Ohkoshi; Keizo Uematsu; Katsuichi Saito

Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
484 KB
Volume
114
Category
Article
ISSN
0022-0248

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