Reactive ion etching of vapor phase deposited polyimide films in CF4O2: effect on surface morphology

✍ Scribed by K. Popova; E. Spassova; I. Zhivkov; G. Danev

• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 440 KB
• Volume: 274
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(95)07077-x