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Influence of intermediate-temperature buffer layer on flicker noise characteristics of MBE-grown GaN thin films and devices

โœ Scribed by B.H. Leung; W.K. Fong; C. Surya


Book ID
108417994
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
99 KB
Volume
212-213
Category
Article
ISSN
0169-4332

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## Abstract The structural properties of 2โ€‰ยตm thick Nโ€face InN film, grown on Si (111) by plasma source molecular beam epitaxy after the initial deposition of 20โ€‰nm AlN and 40โ€‰nm GaN, were examined by transmission electron microscopy. The lattice mismatched GaN/AlN and InN/GaN interfaces limited th