## Abstract The structural properties of 2โยตm thick Nโface InN film, grown on Si (111) by plasma source molecular beam epitaxy after the initial deposition of 20โnm AlN and 40โnm GaN, were examined by transmission electron microscopy. The lattice mismatched GaN/AlN and InN/GaN interfaces limited th
โฆ LIBER โฆ
Effect of Low-Temperature-Grown GaN Intermediate Layer on InN Growth by Plasma-Assisted MBE
โ Scribed by M. Higashiwaki; T. Matsui
- Publisher
- John Wiley and Sons
- Year
- 2003
- Tongue
- English
- Weight
- 707 KB
- Volume
- 0
- Category
- Article
- ISSN
- 1862-6351
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## Abstract InN thin films grown by MOVPE with a thickness of about 100 nm are investigated. Growth was carried out in either two or three steps: deposition of a low temperature nucleation layer at 400 ยฐC and subseโ quent growth of a thicker InN layer at 530 ยฐC, or use of a GaN buffer layer which w