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Influence of interface traps and surface mobility degradation on scanning capacitance microscopy measurement

✍ Scribed by Hong, Y.D.; Yew Tong Yeow; Chim, W.-K.; Kin-Mun Wong; Kopanski, J.J.

Book ID: 114617534
Publisher: IEEE
Year: 2004
Tongue: English
Weight: 649 KB
Volume: 51
Category: Article
ISSN: 0018-9383
DOI: 10.1109/ted.2004.833590

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