Characterisation of rough silicon surfac
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C. Pickering; R. Greef; A.M. Hodge
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Article
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1990
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Elsevier Science
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English
โ 423 KB
A critical comparison of several techniques for the evaluation of imperfections in sificon-onsapphire (SOS) wafers leads to the adoption of a model of the SOS surface based on an effective medium approximation treatment of the ellipsometric" results.